TU Wien develops new semiconductor processing technology

TU Wien can now produce porous structures in monocrystalline silicon carbide. This opens up new possibilities for the realization of micro-and nanomachined sensors and electronic components, but also for integrated optical mirror elements to filter certain colours. Extremely fine porous structures with tiny holes - resembling a kind of sponge at nano level - can be generated in semiconductors. This opens up new possibilities for the realization of tiny sensors or unusual optical and electronic components. There have already been experiments in this area with porous structures made from silicon. Now, researchers at TU Wien have succeeded in developing a method for the controlled manufacture of porous silicon carbide. Silicon carbide has significant advantages over silicon; it has greater chemical resistance and can therefore be used for biological applications, for example, without any additional coating required.